JEOL JEM-ARM200F Cs-korrigiertes Feldemissions-Transmissionselektronenmikroskop

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JEOL JEM-ARM200F Cs-corrected Field Emission Transmission Electron Microscope



JEOL JEM-ARM200F Cs-corrected
Field Emission Transmission Electron Microscope

The JEOL JEM-ARM200F (Atomic Resolution Microscope) is a high-performance TEM with a field emission cathode for analysis at the atomic level in materials science, nanotechnology and lifescinece. This instrument includes completely newly designed, highly stable electron optics with integrated correction of the spherical aberrations (Cs) of the objective and/or condenser lens.

The JEM-ARM200F is the first (S)TEM in its class exclusively developed and optimized for the operation with Cs correctors. In addition to a new, highly stable lens control it also includes a high-performance shielding against sources of interference of different types. The result is a system with a stability that has never been possible before and with the highest resolution worldwide for practical use in the important acceleration voltage range up to 200 kV. The JEM-ARM200F permits imaging and analyses at a level not previously achieved: Atomic analytics with a STEM resolution of better 0.08 nm or a TEM resolution of 0.11 nm represent now routine applications. For that reason, it is accurately named: ARM - Atomic Resolution Microscope.

The Schottky field emission cathode delivers high, long-term stable currents for outstanding performance data for the resolution of analytical issues, even at extremely small beam diameters of <0.05 nm. An optimization especially for EELS applications, which exceeds the above, is what the optionally available cold field emission source (CFEG) with nano tip design offers.

The further improved JEOL side-entry goniometer with five-axis motorization permits programmable saving and recalling of positions with extreme accuracy. Piezo elements for the x/y directions of the goniometer are integrated as a standard for absolute jerk-free movement of the specimen. The extremely stable goniometer has been specially designed for tomography with high tilt angles. The image series is acquired automatically using the optional JEOL tomography software TEMography™, a 3-D reconstruction is calculated and the reconstructed object is displayed using 3-D visualization software.

The Windows™ based user interface of the JEM-ARM200F integrates - in addition to the Cs correction - also analytical auxiliary systems such as EDS and EELS. It is therefore exceptionally intuitive and easy to operate.


Electron optics

Electron source

Field emissions source (Schottky) CFEG optional

Acceleration voltage

80-200 kV

Point resolution

0.11 nm (UHR pole piece with OL correction)

Line resolution

0.10 nm

STEM HAADF resolution

0.08 nm (UHR pole piece with OL correction)

Magnification range TEM

x50 to max. x2,000,000

Magnification range STEM

x100 to max. x150,000,000

Specimen stage


Side-entry goniometer

Stage movement

X: 2 mm
Y: 2 mm
Z: 0.4 mm (depending on the pole piece)
T: up to ±80° (depending on the pole piece and the specimen holder)


Options (selection)

  • Cold field emissions source with nano tip (CFEG)
  • Dual corrector system
  • EDS systems
  • EELS system (GATAN GIF)
  • CCD cameras
  • TEM-/STEM tomography

Pictures JEOL JEM-ARM200F

JEM-ARM200F (Fig. 1)
JEM-ARM200F (Fig. 1)
JEM-ARM200F (Fig. 2)
JEM-ARM200F (Fig. 2)
JEM-ARM200F (Fig. 3)
JEM-ARM200F (Fig. 3)
JEM-ARM200F (Fig. 4)
JEM-ARM200F (Fig. 4)
JEM-ARM200F (Fig. 5)
JEM-ARM200F (Fig. 5)
JEM-ARM200F (Fig. 6)
JEM-ARM200F (Fig. 6)

Please note

Subject to technical changes; errors excepted.
All brand names that appear in the text are registered trademarks of the manufacturers.

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